薄膜トランジスタ（全２巻）
Thin Film Transistors; Volume 1: Amorphous Silicon Thin Film Transistors; Volume 2: Polycrystalline Silicon Thin Transis
Materials and Processes
Ed. by Yue Kuo
- 出版社：Springer
- 出版年月：2003年 00月
- ISBN：9781402075049
- 装丁：HRD
-
装丁について
- 言語：ENG
- 版次：2003. 1000 p.
- 巻数・ページ数：1,000 p.
- 内容紹介：
-
Includes sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes, and existing and new applications. Provides practical information on preparing individual functional a-Si:H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si:H TFT operations and unique material characteristics.