ナノスケール薄膜分析
Nanoscale Thin Film Analysis
Fundamentals and Techniques
Alford, Terry L
Mayer, James W.
Feldman, L. C.
- 出版社:Springer
- 出版年月:2007年 00月
- ISBN:9780387292601
- 装丁:HRD
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装丁について
- 言語:ENG
- 版次:2007. XX
- 巻数・ページ数:380 p.
- 内容紹介:
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A comprehensive treatment of the major characterization techniques used to analyze thin films from the micro- to nanoscale. Incorporates the use of X-ray fluorescence (XRF) in thin film analysis.