- 出版社：William Andrew Publishing
- 出版年月：2018年 02月
- ISBN：9780128123119
- 装丁：PAP
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装丁について
- 言語：ENG
- 版次：4TH
- 巻数・ページ数：470 p.
- DDC分類：621.38152
- 内容紹介：
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The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability.