半導体の機械的性質
Mechanical Properties of Semiconductors
Exploring Elemental, Binary, and Ternary Systems
Pelleg, Joshua
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This book is a comprehensive guide to understanding the mechanical behavior of specific semiconductors: Elemental Semiconductors: Si, Ge; Binary Semiconductors: SiC, GaAs, GaP, InP; Ternary Semiconductors: AlGaAs, GaAsP, ZnCdTe.