薄膜折出ハンドブック（第５版）
Handbook of Thin Film Deposition
Theory, Technology and Semiconductor Applications
Schepis, Dominic (EDT)
Seshan, Krishna (EDT)
- 出版社：Elsevier - Health Sciences Division
- 出版年月：2024年 10月
- ISBN：9780443135231
- 装丁：PAP
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装丁について
- 言語：ENG
- 版次：5TH
- 巻数・ページ数：538 p.
- DDC分類：621.38152
- 内容紹介：
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This book is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro-properties, ferroelectric films, LED research, and materials for memory applications and other thin film applications.