Micro Electromechanical Systems (MEMS)
Practical Lab Manual
IEEE Press Series on Sensors
Goel, Sanket
Kumar, Sanjeet
Bhaiyya, Manish
- 出版社：Wiley-IEEE Press
- 出版年月：2025年 02月
- ISBN：9781394229833
- 装丁：HRD
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装丁について
- 言語：ENG
- 巻数・ページ数：176 p.
- 分類： 電子材料・デバイス
- 内容紹介：
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The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices.