二次イオン質量分析法：基礎・発展・応用
Secondary Ion Mass Spectrometry
Fundamentals, Advancements and Applications
Michałowski, Paweł Piotr (EDT)
- 出版社：Royal Society of Chemistry
- 出版年月：2025年 06月
- ISBN：9781837671007
- 装丁：HRD
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装丁について
- 言語：ENG
- 巻数・ページ数：560 p.
- 分類： 分析化学
- DDC分類：543.65
- 内容紹介：
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Secondary ion mass spectrometry (SIMS) is a technique used to analyse the composition of solid surfaces and thin films by sputtering the surface of the specimen and collecting and analysing ejected secondary ions. This book briefly introduces the fundamentals of the SIMS technique and discusses in detail recent advancements and applications in various branches of science.